发明名称 |
A SENSOR CHIP AND A METHOD OF MANUFACTURING THE SAME |
摘要 |
<p>A sensor chip (100) for detecting particles, the sensor chip (100) comprising a substrate (102), an electric connection structure (104) arranged in a surface portion of the substrate (102) and adapted for an electric connection to an electric connection element (106), a sensor active region (108) arranged in another surface portion of the substrate (102) and being sensitive to the presence of the particles to be detected, and a continuous dielectric layer (110) covering the substrate (102) including covering the electric connection structure (104) and the sensor active region (108).</p> |
申请公布号 |
EP2263078(A1) |
申请公布日期 |
2010.12.22 |
申请号 |
EP20090727454 |
申请日期 |
2009.03.19 |
申请人 |
NXP B.V. |
发明人 |
GRIDELET, EVELYNE;WIDDERSHOVEN, FRANCISCUS;GARCIA TELLO, PABLO;LAMBERT, MAGALI |
分类号 |
G01N27/22;G01N33/487;G01N33/543 |
主分类号 |
G01N27/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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