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发明名称
QUICK-CHANGE PRECURSOR MANIFOLD FOR LARGE-AREA CVD AND PECVD
摘要
申请公布号
EP2262921(A1)
申请公布日期
2010.12.22
申请号
EP20080852565
申请日期
2008.09.02
申请人
OPTISOLAR, INC.
发明人
HARROUN, JAMES, S.
分类号
C23C16/455
主分类号
C23C16/455
代理机构
代理人
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