发明名称
摘要 <p>A protective film transfer sheet comprises a peelable support and a protective film formed on the support, wherein the protective film comprises a protective layer and an adhesive layer formed on the support in this order and the adhesive layer has pressure-sensitive adhesiveness, the adhesiveness of the adhesive layer being increased upon heating after transferred on the image surface of photo masks, and is curable by exposure to ionizing radiation. The protective film formed by the protective film transfer sheet is excellent in adhesiveness to the image surface of photo masks, mar resistance and resistance to solvents.</p>
申请公布号 JP4601769(B2) 申请公布日期 2010.12.22
申请号 JP20000154453 申请日期 2000.05.25
申请人 发明人
分类号 B44C1/16;G03F1/48 主分类号 B44C1/16
代理机构 代理人
主权项
地址