| 摘要 |
PURPOSE: An apparatus for pointing defects on an inspected object is provided to enable a worker to conveniently confirm and adjust the erroneous arrangement and setting errors for a target inspection object by displaying an inspection region. CONSTITUTION: An inspection target object(450) is placed at a target object, and a data unit(420) has data including the information on the position of defects. A processing unit(430) receives the data from the data unit so that a worker can easily find the position of the defects. A projection unit(440) displays the screen configured by the processing unit.
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