| 发明名称 |
GAS FIELD ION SOURCE WITH COATED TIP |
| 摘要 |
<p>Coated tips, as well as related articles, systems and methods are disclosed.</p> |
| 申请公布号 |
EP2263248(A1) |
申请公布日期 |
2010.12.22 |
| 申请号 |
EP20090716494 |
申请日期 |
2009.02.13 |
| 申请人 |
CARL ZEISS SMT, INC. |
发明人 |
NOTTE IV, JOHN V. |
| 分类号 |
H01J37/28;H01J27/26;H01J37/065;H01J37/08;H01J37/26;H01J37/30;H01J49/16 |
主分类号 |
H01J37/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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