发明名称 |
Drive system for ion scanning a workpiece |
摘要 |
<p>A method for reciprocating a workpiece, comprising providing a workpiece on a scan arm. Coupling the scan arm to a motor with a rotor and stator. The rotor and stator being able to individually rotate and counter-rotate about a first axis. Applying an electromagnetic force between the rotor and stator so as to translate the workpiece along a scan path.</p> |
申请公布号 |
EP2264739(A2) |
申请公布日期 |
2010.12.22 |
申请号 |
EP20100180405 |
申请日期 |
2005.04.05 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
VANDERPOT, JOHN;POLLACK, JOHN;BERRIAN, DONALD |
分类号 |
H01J37/317;H01L21/00;H01L21/68;H01L21/687;H02K5/24;H02K16/00 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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