发明名称 |
Housing for an infrared radiation micro device and method for fabricating such housing |
摘要 |
<p>Infrared radiation micro device, cover for such a device and method for its fabrication, the device comprising a substrate and a cover and an infrared radiation detecting, emitting or reflecting infrared micro unit, the infrared micro unit being arranged in a cavity defined between the substrate and the cover, the cover comprising an antireflective surface texture to enhance the transmissibility of infrared radiation, wherein a distance frame formed in an additive process on the substrate side of the cover and/or the cover side of the substrate is arranged between substrate and cover.</p> |
申请公布号 |
EP2264765(A1) |
申请公布日期 |
2010.12.22 |
申请号 |
EP20090163317 |
申请日期 |
2009.06.19 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;ULIS SAS |
发明人 |
REINERT, WOLFGANG;QUENZER, HANS-JOACHIM;TINNES, SEBASTIAN;ROMAN, CECILE |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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