| 摘要 |
<p>A method of manufacturing an ultrasonic transducer array in which plural ultrasonic transducers are arranged on a curved surface with narrow pitches and narrow gaps. The method includes the steps of: (a) preparing a substrate having a curved surface; (b) forming a lower electrode layer on the curved surface of the substrate; (c) forming a piezoelectric material layer on the lower electrode layer; (d) forming an upper electrode layer on the piezoelectric material layer; and (e) forming grooves having predetermined widths with predetermined pitches in a multilayered structure including the lower electrode layer, the piezoelectric material layer and the upper electrode layer formed at steps (b) to (d) so as to form the plural ultrasonic transducers.</p> |
