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发明名称
METHOD OF FORMING OPENINGS IN SELECTED MATERIAL
摘要
申请公布号
EP2109882(A4)
申请公布日期
2010.12.22
申请号
EP20080700321
申请日期
2008.01.10
申请人
NEWSOUTH INNOVATIONS PTY LIMITED
发明人
WENHAM, STUART, ROSS;LENNON, ALISON;UTAMA, ROLAND, YUDADIBRATA;HO-BAILLIE, ANITA, WING, YI
分类号
H01L21/4763
主分类号
H01L21/4763
代理机构
代理人
主权项
地址
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