发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A semiconductor device manufacturing method is provided to simultaneously improve a short channel effect and a gate control power by enabling a gate to cover the upper side and the entire sidewall of a second activated region. CONSTITUTION: A first active region(23) is defined on a substrate(21) by using an element isolation layer. A hard mask pattern is formed on the substrate where the first active region and the element isolation layer are formed. The hard mask pattern forms a second active region(23A) having a fin structure. The hard mask pattern forms a hole pattern which covers a part of the gate predetermined region in the first active region.
申请公布号 KR20100133160(A) 申请公布日期 2010.12.21
申请号 KR20090051905 申请日期 2009.06.11
申请人 HYNIX SEMICONDUCTOR INC. 发明人 YU, JAE SEON
分类号 H01L21/336 主分类号 H01L21/336
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