发明名称 Method and apparatus for fabricating shaped structures and shaped structures including one- , two- or three-dimensional patterns incorporated therein
摘要 The invention includes a template useful for the fabrication of devices having one, two, or three dimensional geometries. The template can include at least a first patterned surface and a mask integrated into the template for creating an interference pattern when radiation is passed through the mask. The template can be useful in the production of shaped structures including one-, two-, or three-dimensionally shaped patterns, and further including at least one shaped surface.
申请公布号 US7855046(B2) 申请公布日期 2010.12.21
申请号 US20060400684 申请日期 2006.04.07
申请人 THE UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE 发明人 SULESKI THOMAS J.
分类号 H01L21/00;G03F1/00 主分类号 H01L21/00
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