发明名称 Structure and method for latchup suppression
摘要 A method and structure for an integrated circuit comprising a substrate of a first polarity, a merged triple well region of a second polarity and a doped region of the second polarity abutting the well region. The doped region is adapted to suppress latch-up in the integrated circuit. The doped region is placed under semiconductor devices of the first polarity and under the well region contact region. Additionally, the structure may further include a deep trench (DT) structure and trench isolation (TI) structure to further improve latchup robustness.
申请公布号 US7855104(B2) 申请公布日期 2010.12.21
申请号 US20070776738 申请日期 2007.07.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 VOLDMAN STEVEN H.
分类号 H01L21/332 主分类号 H01L21/332
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