NEUTRAL PARTICLE BEAM GENERATING APPARATUS AND METHOD WITH INCREASED NEUTRAL PARTICLE FLUX AND TRANSPORT

摘要

PURPOSE: A beam flux, a neutral particle beam generation device thereof, and a method thereof are provided to obtain a high flux neutral particle beam by generating high density plasma. CONSTITUTION: A plasma chamber(100) offers a plasma discharge space which generates plasma. A neutralizing reflecting plate(110) converts plasma ion to a neutral particle. A limiter(300) restricts the plasma ion and electrons except for the neutral particles in the plasma discharge space. A magnetic structure forms a racetrack structure magnetic field inside the plasma discharge space. A magnet cover(220) improve the intensity of the magnetic field by covering the magnetic structure. A microwave irradiation device(120) irradiates a microwave to the plasma discharge space. A processing chamber(400) comprises a substrate mounting table in order to execute a deposition process.