MEASUREMENT METHODOLOGY AND ARRAY STRUCTURE FOR STATISTICAL STRESS AND TEST OF RELIABILITY STRUCTURES

摘要

PURPOSE: A measurement methodology and an array structure for statistical stress and the test of reliability structures are provided to give stress to a plurality of semiconductor devices at the same time and individually test them while maintaining the stress applied to the semiconductor devices which are not in test. CONSTITUTION: A control circuit is formed on a wafer and includes a switch configuration circuit(415). The switch configuration circuit responds to a control signal for operating switch elements. The switching configuration circuit transmits a signal to a transistor device at a predetermined time and a sustain time. A local signal generation circuit receives a plurality of digital signals and generates an additional local signal for selecting certain one of the transistor devices.