发明名称 Method of forming metal lines and bumps for semiconductor devices
摘要 Provided is a method of forming conductors (e.g., metal lines and/or bumps) for semiconductor devices and conductors formed from the same. First and second seed metal layers may be formed. At least one mask may be formed on a portion on which a conductor is to be formed. An exposed portion may be oxidized. The oxidized portion may be removed. A conductive structure may be formed on an upper surface of a portion which is not oxidized. The conductors may be metal lines and/or bumps. The conductive structures may be solder balls.
申请公布号 US7855144(B2) 申请公布日期 2010.12.21
申请号 US20060589717 申请日期 2006.10.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM SOON-BUM;SIM SUNG-MIN;JANG DONG-HYEON;CHUNG JAE-SIK;OH SE-YONG
分类号 H01L21/44 主分类号 H01L21/44
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