发明名称 Microactuator substrate
摘要 The substrate includes a stroke amplifier for generating an amount of amplified motion converted from a force received thereon. The substrate also includes a rotating device coupled to the stroke amplifier, the rotating device comprising supporting rotational springs. The rotating device is separate and independent from the stroke amplifier and has a center of rotation substantially proximal to a center of mass of an object disposable thereon. The rotating device causes a rotation in a portion of the substrate upon receiving said amplified motion. The substrate further includes a piezoelectric actuator that is coupled to the stroke amplifier and is for generating the force. The stroke amplifier and the rotating device are integrated within the substrate.
申请公布号 US7855489(B2) 申请公布日期 2010.12.21
申请号 US20070701274 申请日期 2007.01.31
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES, NETHERLANDS,B.V. 发明人 HIRANO TOSHIKI
分类号 H01L41/08 主分类号 H01L41/08
代理机构 代理人
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