METHOD OF PRODUCING TRICHLOROSILANE (TCS) RICH CHLOROSILANE PRODUCT STABLY FROM A FLUIDIZED GAS PHASE REACTOR (FBR) AND THE STRUCTURE OF THE REACTOR

摘要

PURPOSE: A method for steadily producing the chloro silane compound including high contamination of trichlorosilane by using fluid layer reactor and a fluid bed reactor for the same are provided to lower the generating rate of STC(Silicon TetraChloride) within 10%, thereby reducing the manufacturing cost of poly silicon. CONSTITUTION: A lower part(21) of a fluid bed reactor(20) includes a plurality of gas holes and a plurality of punching covers. A gas distribution plate(24) is installed in the lower part. An inner cooling device(29) is mounted inside a upper part of the reactor. An initial charged substance input unit(31) injects an initial charged filling inside of the reactor. A MGSI(Metallurgical Silicon) injection device(32) controls the silicon injection speed. By a plurality of thermocouples(51), the temperature inside the fluid bed reactor is identified.