发明名称 |
STICKING METHOD AND STICKING APPARATUS |
摘要 |
PURPOSE: A method and a sticking device thereof are provided to stick a support plate to a substrate by preventing each adhesive layer from being mixed and sunken and simply and rapidly foliating it. CONSTITUTION: A first glue layer(4) is formed on a substrate. An isolation film layer is formed on the first glue layer. A second glue layer(6) has a faster dissolution speed than the first glue layer. The second glue layer is dissolved in a different solvent in which the first glue layer is dissolved. |
申请公布号 |
KR20100133305(A) |
申请公布日期 |
2010.12.21 |
申请号 |
KR20100053812 |
申请日期 |
2010.06.08 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
IMAI HIROFUMI;TAMURA KOKI;ASAI TAKAHIRO;YOSHIOKA TAKAHIRO;INAO YOSHIHIRO |
分类号 |
H01L21/304;C09J11/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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