LITHOGRAPHIC PROJECTION APPARATUS.,申请号NL20102004872-传众专利搜索

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发明名称	LITHOGRAPHIC PROJECTION APPARATUS.
摘要
申请公布号	NL2004872(A)	申请公布日期	2010.12.20
申请号	NL20102004872	申请日期	2010.06.11
申请人	ASML NETHERLANDS B.V.	发明人	DAMEN, JOHANNES;SIJBEN, ANKO;ROZENVELD, JOHANNES;DEKKERS, JEROEN-FRANK;BRINKHOF, EUGENE;LANGELER, HERMAN;GOMPEL, PETER
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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