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经营范围
发明名称
METHOD FOR MANUFACTURING EPITAXIAL WAFER
摘要
申请公布号
KR101002250(B1)
申请公布日期
2010.12.20
申请号
KR20087019163
申请日期
2007.01.24
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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