PREPARING METHOD OF LIQUID COMPOSITION FOR STRIPPING AN ORGANIC DIELECTRIC LAYER
摘要
PURPOSE: A method for preparing a liquid composition for stripping an organic dielectric layer is provided to prevent damage of metal wiring and color resist located at the lower part of the organic dielectric layer and to remove a negative type organic dielectric layer for TFT-LCD in a short time. CONSTITUTION: A method for preparing a liquid composition comprises the steps of: stirring 3-15 parts by weight of tetramethyl ammonium hydroxide or its salt, 10-60 parts by weight of glycol ether, and 9-45 parts by weight of water at 90-120 °C for 2-72 hours; and adding 20-40 parts by weight of water-soluble amine to the mixture cooled to a room temperature. The pressure within mixer is maintained to 1.5-5 atm.
申请公布号
KR20100132586(A)
申请公布日期
2010.12.20
申请号
KR20090051254
申请日期
2009.06.10
申请人
DONGJIN SEMICHEM CO., LTD.
发明人
KIM, BYUNG UK;YOON, SUK IL;JEONG, JONG HYUN;HUH, SOON BEOM;SHIN, SUNG GUN;JUNG, SE HWAN;JANG, DOO YOUNG;PARK, SUN JOO;KWEON, O HHWAN