| 摘要 |
FIELD: physics. ^ SUBSTANCE: double-beam ion source consists of a housing in which there are two independent ion beam sources which form two independent and non-crossing beams directed in different sides. The housing is divided by a common cathode into two coaxial insulated gas-discharge chambers, and each gas-discharge chamber has its own anode and system for supplying working gas, where the common cathode is electrically connected to the housing. ^ EFFECT: design of two independent and non-crossing beams, directed in different sides in a single ion source. ^ 2 cl, 1 dwg |
