CATHODE MODULE FOR TARGET-EFFICIENCY IMPROVEMENT IN FACING TARGETS SPUTTERING SYSTEM

摘要

PURPOSE: A cathode module for enhancing the target efficiency of an opposite target type of sputter equipment is provided to raise the cathode falling energy of a particle and to enable high-speed sputtering since particles on a target can uniformly cathode-fall on the front of the target. CONSTITUTION: A sputter gun consists of a first yoke plate(4), a second yoke plate and a plurality of magnets(10). One or both sides of the first yoke plate are open. The yoke plates are arranged on the center of the magnet at regular intervals. The magnets consist of upper and lower parts. The upper and lower parts of a polygon shape have different magnetic poles. Each magnet has a trapezoid shape. The yoke plate and a yoke post are formed in a T-shape. A pair of sputter guns are arranged to face each other.