COOLING NOZZLE, COOLING METHOD USING THE SAME, AND METHOD FOR DIVIDING BRITTLE MATERIAL SUBSTRATE

摘要

PURPOSE: A cooling nozzle, a cooling method using the same, and a method for cutting a brittle material are provided to efficiently cool a part of a cooling target with few amount of a coolant. CONSTITUTION: A gas exhausting hole(61) is formed into a circular shape. A liquid pipe(8) is outwardly protruded from the center part of the gas exhausting hole. A coolant is exhausted through the liquid pipe. The protruded length of the liquid pipe is between 0.5 and 1.0mm. A linear pipe is in connection with the end part(81) of the liquid pipe. The length of the linear pipe is more than or equal to 3mm. The diameter of the linear pipe is the same as that of the liquid pipe.