发明名称 ULTRASONIC EDGE WASHING APPARATUS
摘要 PROBLEM TO BE SOLVED: To solve the problem of a conventional ultrasonic edge washing apparatus being only able to wash a small area at the end of the subject 1 of washing because bifurcated portions 3a, 3b are formed at the tip of a conically shaped hone 3 and the bifurcated portions 3a, 3b are extremely short. SOLUTION: A supply section 7 and a discharge section 8 for a washing solution are mounted to a back 6. Inclined walls 9, 10 are formed oppositely to each other from upper and lower ends of the back 6, respectively. A slot 11 is formed between the inclined walls 9, 10 and sidewalls 12, 13 are formed between the inclined walls 9, 10 to form a casing 14. The slot 11 extends to the sidewalls 12, 13 to form a cutout 15. Ultrasonic vibrators 14, 15 are mounted on the inclined walls 9, 10, respectively, and oscillation outputs are applied from an oscillator (not shown) to the ultrasonic vibrators 14, 15. An exterior wall 16 is formed in such a manner as to cover the ultrasonic vibrators 14, 15. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010282994(A) 申请公布日期 2010.12.16
申请号 JP20090132764 申请日期 2009.06.02
申请人 HONDA ELECTRONIC CO LTD 发明人 MAKI KANEO
分类号 H01L21/304;B08B3/12 主分类号 H01L21/304
代理机构 代理人
主权项
地址