| 摘要 |
PROBLEM TO BE SOLVED: To provide MEMS capable of driving an electro-static actuator so as to not generate inconvenience even if a sufficiently long time is passed in the holding state. SOLUTION: The MEMS includes the electro-static actuator having a lower electrode 15 on a base plate 12, an upper electrode 17 arranged such that a vacancy is present between the base plate and it and a first insulation film 42 arranged between the upper electrode and the lower electrode; and first electrodes 18A, 18B formed on the base plate so as to be spaced from the lower electrode; a second electrode 19 formed between the upper electrode and it through an insulation body and arranged so as to be opposed to the first electrode; and a bias circuit 23 making the lower electrode 15 as a grounding voltage during when a drive voltage is applied to the upper electrode 17 of the electro-static actuator and making the upper electrode 17 as the grounding voltage during when the drive voltage is applied to the lower electrode 15. A distance between the first electrode and the second electrode is varied by applying the drive voltage and the grounding voltage to the upper electrode and the lower electrode 17 by the bias circuit 23. COPYRIGHT: (C)2011,JPO&INPIT
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