| 摘要 |
Methods and systems for laser-scribing lines within a controlled separation from previously-formed lines are provided. A laser-scribing method includes providing a workpiece having a plurality of previously-scribed lines, forming a first adjacent scribed line adjacent to a first previously-scribed line, using an imaging device to measure a position of a previously-scribed line, using the imaging device to measure a position of the first adjacent scribed line, and using the measured positions to control the formation of a second adjacent scribed line adjacent to a second previously-scribed line.
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