发明名称 TRANSFER APPARATUS, AND TRANSFER METHOD
摘要 <p>A mold is pushed to a transfer object so that a rugged or pitched pattern formed on the mold may be transferred to the transfer object, and the mold pushing the transfer object is released from the transfer object while at least one of the mold and the transfer object is being warped.</p>
申请公布号 WO2010143302(A1) 申请公布日期 2010.12.16
申请号 WO2009JP60789 申请日期 2009.06.12
申请人 PIONEER CORPORATION;FUJINAWA, TADASHI;KASUYA, TAKAYUKI 发明人 FUJINAWA, TADASHI;KASUYA, TAKAYUKI
分类号 B29C59/02;B29C33/44;B29L17/00;G11B5/84;H01L21/027 主分类号 B29C59/02
代理机构 代理人
主权项
地址