| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a magnetic member for an RFID, the magnetic member enhancing effectively, in particular, a communication sensitivity, compared with that in the prior art, as to structure for film-forming a magnetic film on a base material by a physical vapor deposition method; and to provide an RFID device. <P>SOLUTION: The magnetic films 7, 8 are laminated to form a plurality of layers while separated by an insulating film 6b, by the physical vapor deposition method, although the magnetic film is film-formed of a single layer on the base material in the prior art. A film thickness in each of the magnetic films 7, 8 is preferably 0.5μm or more to 3μm or less. The layer number of magnetic films is within 2-8 of range, in particular, the layer number is preferably 2. The magnetic films 7, 8 are formed, for example, of an Fe-M-O film or an Fe-M-N film, and the insulating films 6a, 6b, 6c are formed, for example, of an SiO<SB>2</SB>film. The communication sensitivity of the RFID device is effectively enhanced compared with that in the prior art, by using the magnetic member for the RFID. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
