| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a noise is over-detected as a defect when detecting a defect small compared with a wall thickness, which are caused by the fact that a ratio of a transmitted radiation amount (noise) changed due to the effect, etc. of the scattering of radiation in passing through a metal material as an inspecting object to a transmitted radiation amount changed due to the defect becomes small. SOLUTION: Radiations are applied to the inspecting object is irradiated with the radiations different in photon energy to acquire a plurality of transmitted radiation images. Defect detection images are generated based on the plurality of radiation images. Based on the defect detection images, it is determined whether defects are included in the inspecting object while it is determined whether the inspecting object is acceptable. COPYRIGHT: (C)2011,JPO&INPIT |
