| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine structure transfer device which does not use a press mechanism, causes no generation of a transfer defect due to an air bubble, and facilitates the separation of a stamper. SOLUTION: In the fine structure transfer device, a first strut 9 and a second strut are erected on the upper surface of a base plate 3; one end of a long stamper 7 is fixed to the upper end of the first strut; another end of the long stamper is vertically ascendably descendably supported by an elevator arranged on the second strut; a stage for placing a transfer item is arranged at a position corresponding to the position where a fine pattern on the downward surface side of the long stamper exists that is on the upper surface of the base plate between the first strut and the second strut; and a pressing device reciprocatively moving in the lengthwise direction of the long stamper is arranged on the upper surface side of the long stamper. COPYRIGHT: (C)2011,JPO&INPIT
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