发明名称 GaN Single-Crystal Mass and Method of Its Manufacture, and Semiconductor Device and Method of Its Manufacture
摘要 Affords a GaN single-crystal mass, a method of its manufacture, and a semiconductor device and method of its manufacture, whereby when the GaN single-crystal mass is being grown, and when the grown GaN single-crystal mass is being processed into a substrate or like form, as well as when an at least single-lamina semiconductor layer is being formed onto a single-crystal GaN mass in substrate form to manufacture semiconductor devices, cracking is controlled to a minimum. The GaN single-crystal mass 10 has a wurtzitic crystalline structure and, at 30° C., its elastic constant C11 is from 348 GPa to 365 GPa and its elastic constant C13 is from 90 GPa to 98 GPa; alternatively its elastic constant C11 is from 352 GPa to 362 GPa.
申请公布号 US2010314625(A1) 申请公布日期 2010.12.16
申请号 US20100797617 申请日期 2010.06.10
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 NAKAHATA HIDEAKI;FUJIWARA SHINSUKE;SAKURADA TAKASHI;YAMAMOTO YOSHIYUKI;NAKAHATA SEIJI;UEMURA TOMOKI
分类号 H01L29/20;C01B21/06;C30B23/00;H01L21/20 主分类号 H01L29/20
代理机构 代理人
主权项
地址