发明名称 EVALUATION DEVICE, MEASURING ARRANGEMENT AND METHOD FOR PATH LENGTH MEASUREMENT
摘要 An evaluation device (51) for path length measurement is adapted to evaluate a measured signal (15) which represents an intensity of a sequence of pulses of electromagnetic radiation as a function of time. The sequence of pulses has a repetition rate. The evaluation device (51) is adapted to evaluate a phase difference between a component (63) of the measured signal (15), which component oscillates with a first frequency, and a reference signal (67) which oscillates with said frequency. The evaluation device (51) produces, for example by frequency mixing, a first signal (65) and a second signal (69) having a second phase difference (73) in such a manner that the first signal (65) and the second signal (69) each oscillates with another frequency that is different from the frequency, and such that the second phase difference (73) has a predetermined relation to the phase difference (47).
申请公布号 WO2010142758(A1) 申请公布日期 2010.12.16
申请号 WO2010EP58139 申请日期 2010.06.10
申请人 CARL ZEISS AG;SPRUCK, BERND;HOELLER, FRANK;ALVAREZ DIEZ, CRISTINA 发明人 SPRUCK, BERND;HOELLER, FRANK;ALVAREZ DIEZ, CRISTINA
分类号 G01S17/36 主分类号 G01S17/36
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