发明名称 |
Gehäuse mit Vorrichtung zum Zapfen von Chemikalien mit Spüleinrichtung |
摘要 |
<p>The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated. <IMAGE></p> |
申请公布号 |
DE60334749(D1) |
申请公布日期 |
2010.12.16 |
申请号 |
DE2003634749 |
申请日期 |
2003.01.07 |
申请人 |
AIR PRODUCTS AND CHEMICALS INC. |
发明人 |
BIRTCHER, CHARLES MICHAEL;MARTINEZ, MARTIN CASTENEDA;STEIDL, THOMAS ANDREW;VIVANCO, GIL;SILVA, DAVID JAMES |
分类号 |
B67D7/02;H01L21/205;F17C13/04 |
主分类号 |
B67D7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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