GAS INJECTION APPARATUS FOR LARGE PROCESSING CHAMBER

摘要

PURPOSE: A gas injecting apparatus is provided to absorb the thermal expansion from the center to the edge of a shower head by rotating a first ball hinge unit inserted into a gas box and a second ball hinge unit inserted into a shower head. CONSTITUTION: A shower head(10) comprises a plurality of gas injecting holes(11). A gas box(20) is installed on the upper side of the shower head. Reaction gas supplied from a gas supply source is inputted to the gas box. A conductive thin plate(44) is arranged between the edges of the shower head and the gas box. A buffering member(30) is connected to the shower head and the gas box.