发明名称 COMPONENT MOUNTING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a component mounting device that is made to be compact on the whole although a tool holding member, which three heads, i.e. a pickup head, a mounting head, and a transfer head can access, is installed between a component supply unit and a substrate holder. <P>SOLUTION: The tool holding member 63, which holds respective tools 23a, 34a, and 44a for replacement of the pickup head 22, mounting head 33 and transfer head 43 provided movably in a Y-axial direction wherein a component supply stage 3 and a substrate holding stage 4 are lined up, is provided in an overlap area R of a movable area R1 of the pickup head 22, a movable area R2 of the mounting head 33 and a movable area R3 of the transfer head 43, on a moving table 15 provided in an area R0 between the component supply stage 3 and substrate holding stage 4 movably in an X-axial direction perpendicular to the Y-axial direction. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010282996(A) 申请公布日期 2010.12.16
申请号 JP20090132807 申请日期 2009.06.02
申请人 PANASONIC CORP 发明人 HIRAKI TSUTOMU
分类号 H01L21/52 主分类号 H01L21/52
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