| 摘要 |
PROBLEM TO BE SOLVED: To offer an electrostatic actuator which generates a large driving force, without increasing the number of interdigital electrodes. SOLUTION: The lengths of first and second movable body electrodes 320a and 320b, in a direction perpendicular to the extension of the first and second movable body electrodes 320a and 320b and parallel with a mirror surface 301 are regarded as the widths of the first and second movable body electrodes 320a and 320b. Then, the widths of the first and second movable body electrodes 320a and 320b are largest at a connection portion for connection to a movable body 300 and become smaller, linearly as the movable body electrodes approach a frame 200. The lengths of the first and second movable body electrodes, in the direction of thickness of the movable body 300, remain the same both at the connection portion for connection to the movable body 300 and at a portion where the movable body electrodes become closest to the frame 200. COPYRIGHT: (C)2011,JPO&INPIT
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