发明名称 Ultrasonic probe
摘要 There is provided a crystal resonator (crystal element) in which the probability of chipping occurring in separation is small when there is one supporting section with respect to a frame section of a crystal wafer, and inclined surfaces due to the anisotropy of etching are eliminated. The present invention relates to a crystal resonator manufacturing method such that an AT-cut crystal wafer is etched, a large number of rectangular crystal elements are joined with frame sections by supporting sections, and the crystal elements are mechanically cut away from the frame sections. On both sides of the +X-axis one end section of the crystal element, at least the outer side surface has a planarly tapered projection having a triangular inclined surface with an apex in the −X-axis direction, and the tip end of the projection has processing traces of the etching in the +X-axis direction.
申请公布号 US2010314355(A1) 申请公布日期 2010.12.16
申请号 US20100802290 申请日期 2010.06.03
申请人 NIHON DEMPA KOGYO CO., LTD. 发明人 TAKAHASHI TAKEHIRO
分类号 H01L41/22 主分类号 H01L41/22
代理机构 代理人
主权项
地址