NANOSTAGE USING PIEZOELECTRIC ACTUATOR

摘要

PURPOSE: A nano stage using a piezoelectric element is provided to remove an additional position determining device by implementing a linear transfer and a rotation movement through one actuator. CONSTITUTION: A first link(31) is rotatably combined with a support unit(20). A second link(32) is rotatably combined with the support unit. A first actuator(41) is combined with the first link. A second actuator(42) is combined with the second link. A moving unit is rotatably combined with the ends of the first and second links.