Method for Measuring Thermo-Optically Induced Material Phase-Change Response in a Multiple Layer Thin Film Structure Using Visible and Ultraviolet Spectroscopy

摘要

A method and device for facilitating measurement of thermo-optically induced material phase change response in a thin planar or a grating film stack is disclosed. The method may include using small-spot visible and ultraviolet spectra (ellipsometric or reflectance) for measuring a material phase change response. The device may include a measurement system platform, at least one electrical resistor, at least one external electric probe, and ohmic contact circuitry.