SPIN ON ORGANIC ANTIREFLECTIVE COATING COMPOSITION COMPRISING POLYMER WITH FUSED AROMATIC RINGS
摘要
<p>The present invention relates to an organic spin on hard mask antireflective coating composition comprising a polymer comprising at least one unit of fused aromatic rings in the backbone of the polymer and at least one unit with a cycloaliphatic moiety in the backbone of the polymer. The invention further relates to a process for making the polymer and a process for imaging the present composition.</p>
申请公布号
WO2010143054(A1)
申请公布日期
2010.12.16
申请号
WO2010IB01401
申请日期
2010.06.09
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
RAHMAN, M., DALIL;MCKENZIE, DOUGLAS;LIN, GUANYANG;SHAN, JIANHUI;ZHANG, RUZHI;NEISSER, MARK, O.
