| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device of treating exhaust gas efficiently decomposing PFC gas while preventing deactivation even in scaled up actual equipment and having excellent durability. <P>SOLUTION: In the method of treating exhaust gas including persistent perfluoro compound (PFC), the exhaust gas is heated and decomposed at 700°C or higher in the presence of oxygen, and the decomposed gas 4 is made to pass through a reaction tank 5 filled with a PFC treatment agent 7 (perfluoro compound treatment agent) comprising a complex oxide obtained by burning a mixture of Al(OH)<SB>3</SB>and Ca(OH)<SB>2</SB>. The PFC treatment agent 7 can be obtained by forming and drying the mixture having 3:7-5:5 of a molar ratio of Al(OH)<SB>3</SB>having an average particle size (median size) of 55-160μm to Ca(OH)<SB>2</SB>and burning the mixture in a nitrogen flow or an air flow in a range of 430-890°C. Preferably, the reaction tank 5 is heated to 500°C or higher. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
