APPARATUS AND METHOD FOR LASER BEAM MACHINING AND MANUFACTURING METHOD OF SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To obtain a laser beam machining apparatus, which conducts laser-beam machining to form fine stripes stably at a high speed.

SOLUTION: The laser beam machining apparatus conducts laser-beam machining to form stripes on the to-be-machined surface of an object to be machined by irradiating the surface with a pulsed laser-beam. The laser beam machining apparatus includes: an object to be machined conveying means for holding and conveying the object to be machined with the to-be-machined surface turned up; a laser-beam moving means for relatively moving the position of the pulsed laser-beam on the object to be machined in a first direction; a laser oscillator for emitting a pulsed laser-beam; a diffraction optical element for branching the pulsed laser-beam into branch patterns disposed so that branched laser-beams adjacent to each other are arranged with specified intervals in the first direction; and a beam condensing means for condensing the pulsed laser-beam branched by the diffraction optical element on the to-be-machined surface. The laser-beam machining to form stripes on the to-be-machined surface is performed while relatively moving the branched pulsed laser-beams and the object to be machined.

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