发明名称 |
MEASURING DIFFRACTING STRUCTURE, BROADBAND, POLARIZATION, ELLIPSOMETRY, AND UNDERLYING STRUCTURE |
摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method and device for easily performing exact measurement of an extremely fine line width and quantification about a profile of an etching structure on a pattern wafer. SOLUTION: Before the diffraction from a diffracting structure 12c on a semiconductor wafer, the film thickness and index of refraction of a film underneath the structure are first measured using a spectroscopic reflectometry or spectroscopic ellipsometry when required. A rigorous model is then used to calculate the intensity or the ellipsometric signature of the diffracting structure. The diffracting structure 12c is then measured using a spectroscopic scatterometer using polarized radiation and broadband radiation to obtain the intensity or an ellipsometric signature of the diffracting structure. This signature is matched with the signature in a database to determine the grating shape parameter of the structure. COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2010281822(A) |
申请公布日期 |
2010.12.16 |
申请号 |
JP20100131079 |
申请日期 |
2010.06.08 |
申请人 |
KLA-TENCOR CORP |
发明人 |
XU YIPING;ABDULHALIM IBRAHIM |
分类号 |
G01B11/02;G01N21/21;G01B11/06;G01N21/27;G01N21/33;G01N21/95;G01N21/956;G03F7/20;H01L21/66 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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