| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration board which can perform the electric characteristics of a semiconductor device and the calibration of two probes without probe replacement and measure the electric characteristics with high calibration accuracy maintained. SOLUTION: The calibration board includes: a wafer 5 which includes a product chip area in which a product chip is formed and a calibration device area in which a calibration device for measuring the electric characteristics of the product chip is formed; a semiconductor device 42 which is formed in the product chip area of the wafer 5 and includes an input signal path 66 and output signal paths 67, 68 which are orthogonal to each other on the wafer 5; and four calibration devices, each of which is formed in the calibration device area of the wafer 5 and in which an input pad and an output pad, which are arranged orthogonal to each other and with which each probe tip of the two probes 14, 15 and a probe 16, which are brought into contact with the input/output of the semiconductor device 42, is brought into contact, are provided on the input/output sides. COPYRIGHT: (C)2011,JPO&INPIT
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