| 摘要 |
PROBLEM TO BE SOLVED: To provide a noncontact measuring method for the electric conduction property of a semiconductor using a surface acoustic wave which specifies electric conductivity, mobility, and impurity level easily, at low cost, and efficiently and a method of the same. SOLUTION: The method includes: a first process which arranges a platelike semiconductor 14 with a gap provided with respect to an area between an input electrode 11 and an output electrode 12 of a platelike piezoelectric body 13 having the input electrode 11 and the output electrode 12 on both its ends; a second process which generates a surface acoustic wave on the piezoelectric body 13 by applying a high-frequency input voltage to the input electrode 11, moves the surface acoustic wave toward the output electrode 12 while applying an AC electric field associated with the surface acoustic wave to the semiconductor 14, and measures a high-frequency output voltage caused by the surface acoustic wave by the output electrode 12; and a third process which calculates a propagation rate V<SB>out</SB>/V<SB>in</SB>of the surface acoustic wave moving from the input electrode 11 to the output electrode 12 from an amplitude voltage value V<SB>in</SB>of the high-frequency input voltage and an amplitude voltage value V<SB>out</SB>of the high-frequency output voltage and determines the relative value of the electric conductivity of the semiconductor 14 using the propagation rate. COPYRIGHT: (C)2011,JPO&INPIT
|
