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发明名称
Mehrschichtiges korrosionsresistentes Keramikelement
摘要
申请公布号
DE602008003291(D1)
申请公布日期
2010.12.16
申请号
DE20086003291T
申请日期
2008.09.30
申请人
SHIN-ETSU CHEMICAL CO. LTD.
发明人
KANO, SHOJI;YAMAMURA, WAICHI;KUBOTA, YOSHIHIRO
分类号
H01L21/00;H01L21/683;H01L21/687;H02N13/00;H05B3/14
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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