| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement apparatus capable of measuring wavefront aberrations correctly and efficiently. <P>SOLUTION: The measurement apparatus which measures the wavefront aberrations of an optical system 31 to be measured includes an imaging device 53 imaging an interference fringe, including the aberration information of the optical system to be measured; a calculation unit 55a calculating the wavefront aberration, based on the interference fringe imaged by the imaging device; and a determination unit 55b, calculating the evaluation value indicating a wavefront state, based on the wavefront aberration calculated by the calculation unit and determining the calculated wavefront aberrations as the wavefront aberrations of the optical system, when the evaluation value falls within the allowable range. <P>COPYRIGHT: (C)2011,JPO&INPIT |
