| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card of a MEMS type which mounts numerous small probe units having such a structure that only the probe units mounted on a substrate can be replaced. SOLUTION: The probe card includes a circuit board, a plurality of probe units having a plurality of cantilevered probes formed at a predetermined position, and a wiring board provided on one of surfaces of the circuit board and having the plurality of probe units arranged in a plurality of columns and a plurality of rows, and is such that the probe units are soldered to the wiring board, and that the wiring board has an electrical heating unit built into a surface opposite to the probe units. COPYRIGHT: (C)2011,JPO&INPIT
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