| 摘要 |
PROBLEM TO BE SOLVED: To provide a cobalt-iron alloy sputtering target material which is produced by a simple melt casting method and has high leakage flux. SOLUTION: The cobalt-iron alloy sputtering target material is produced by a melt casting method, and composed of cobalt, iron and an additional metal(s), wherein the cobalt is contained in amount containing the increased leakage flux (PTF), and the additional metal is contained in amount of 8-20 atom% and includes at least one metal selected from tantalum, zirconium, niobium, hafnium, aluminum and chromium. COPYRIGHT: (C)2011,JPO&INPIT
|
